As a technology partner to the semiconductor industry, Dockweiler supplies UHP tubes, molded parts and complex systems for gas and vacuum applications. Our goal: efficiency and safety through high-quality components tailored to the process - from consulting to clean room production.
Your specialist for microelectronics
High-purity solutions - perfectly customized to the requirements of the semiconductor and microelectronic component manufacturing industry. Whether it's the supply of semiconductor factories (fit-up or hook-up of FABs) or state-of-the-art lithography technology, Dockweiler has the right supply systems.
The perfect combination for high purity media
Content:
Maximum demands on quality
Dockweiler has been a pioneer in the semiconductor industry from the very beginning. Since the early 1980s, with the rise of the first personal computers, we have specialized in stainless steel tubes and fittings for this industry. Our components are prefabricated in certified production environments, manufactured under ISO class 4, 6 and 8 clean room conditions and have electropolished inner surfaces with roughnesses of up to Raavg. ≤ 0.25 µm, optionally even a maximum of 0.13 µm. Each item is 100% helium-tested for leaks - with leakage rates of 1 x 10-⁷ scc/sec for PCW and CFOS and 1 x 10-⁹ scc/sec for UHP products. Welding records, quality certificates and complete traceability via heat number and material class are a matter of course for us.
Microelectronics products
Dockweiler stainless steel tubes and fittings for the semiconductor industry are available to various standards (materials and internal surface finishes). The tube dimensions vary from an internal diameter of 3 millimetres (1/8") up to NPS 20.
Microelectronics special
UHP Manifold Systems
Faster, safer, cleaner: Dockweiler's UHP distributors are individually manufactured, pre-assembled and delivered tested - for smooth installation and maximum process reliability. Less effort on site, more control in the factory - quality without compromise.
Find out more in our brochure - download now!
High-purity tube and manifold systems play an important role in ensuring production reliability.
Perfect surfaces - because any contamination is one too many
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Services für Microelectronics
Particle measurement and residual gas analysis (RGA)
At Dockweiler, the particle cleanliness of tube systems is determined in a clean room using two measuring methods: DPC (Discrete Particle Count) and CPC (Condensation Particle Count). The residual gas analysis determines the remaining content of water and volatile and non-volatile hydrocarbons after cleaning. Both methods document the cleanliness level defined by the customer before delivery.
We are absolutely strict when it comes to safety! Especially for highly reactive process gases, we quickly opt for the ultron tube.
Paul MettenGeneral Manager | Exentec Germany GmbH
Customer benefits
High Purity
Pioneer in the development of high-purity surfaces for the semiconductor industry
Industry standard
The Dockweiler surface finishes Finetron, TCC and Ultron are the industry standard.
Metallurgy expert
Specialists in metallurgy and optimization of stainless steel surfaces
More information
Flexibility without compromise
Maximum flexibility and the highest purity - with electropolished stainless steel corrugated hoses from Dockweiler Flextron, you can guarantee uncompromising quality for your processes. Ideal for applications in microelectronics and fine chemicals.
Manifolds tailored to your needs
Tailor-made manifold systems for maximum efficiency: our solutions offer the perfect distribution of media and adapt perfectly to your processes. Developed in ISO class 4 cleanrooms for maximum cleanliness and process reliability.
Precision in perfection
With over 30 years of experience in surface treatment, we guarantee the highest levels of purity and durability. Our processes such as electropolishing and pickling set new standards in the industry.